Apparatus with a spectral reflectometer for processing substrates
US9752981B2 · kind B2 · utility
1Cited by
6References
17Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 1, 2016 |
| Grant date | Sep 5, 2017 |
| Priority date | — |
| Expiry date | Apr 1, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/1222
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A spectral reflectometer system for measuring a substrate is provided. A light source is provided. At least one optical detector is provided. An optical cable comprises a plurality of optical fibers, wherein the plurality of optical fibers comprises a first plurality of optical fibers, which are transmission optical fibers which extend from the light source to an optical path, and a second plurality of optical fibers, which are reflection optical fibers which extend from the optical path to the at least one optical detector. A microlens array is in the optical path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.