Inventor · Goyang-si, KR

Duk-Ho Hong

5Patents
3h-index
14Co-inventors
43Inventor score

Filing activity: Sep 3, 2002 → Sep 28, 2005

Most-cited inventions

PatentTitleAreaCited byStatus
US7166019B2 Flexible membrane for a polishing head and chemical mechanical polishing (CMP) apparatus having the same Emerging Cross-Sectional Technologies 8 Expired
US6976902B2 Chemical mechanical polishing apparatus Performing Operations; Transporting 5 Expired
US6924234B2 Method and apparatus for polishing a copper layer and method for forming a wiring structure using copper Electricity 3 Expired
US7435673B2 Methods of forming integrated circuit devices having metal interconnect structures therein Electricity 2 Active
US7282451B2 Methods of forming integrated circuit devices having metal interconnect layers therein Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.