E. Kent Barefield
2Patents
2h-index
5Co-inventors
30Inventor score
Filing activity: Nov 21, 1989 → Mar 17, 1992
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5108983A | Method for the rapid deposition with low vapor pressure reactants by chemical vapor deposition | Emerging Cross-Sectional Technologies | 21 | Expired |
| US5352656A | Method for the chemical vapor deposition of group IB and group VIIIB metal barrier layers | Emerging Cross-Sectional Technologies | 12 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.