Eda Tuncel
4Patents
2h-index
23Co-inventors
44Inventor score
Filing activity: May 22, 2002 → May 3, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8293656B2 | Selective self-aligned double patterning of regions in an integrated circuit device | Electricity | 7 | Active |
| US7105442B2 | Ashable layers for reducing critical dimensions of integrated circuit features | Electricity | 4 | Expired |
| US10896833B2 | Methods and apparatus for detecting an endpoint of a seasoning process | Physics | 2 | Active |
| US9303318B2 | Multiple complementary gas distribution assemblies | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.