Inventor · Nirasaki, JP

Eiichiro Kikuchi

6Patents
1h-index
8Co-inventors
40Inventor score

Filing activity: Mar 19, 2007 → Jul 21, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US10541158B2 Temperature adjustment method using wet surface in a processing chamber Electricity 1 Active
US9214376B2 Substrate mounting stage and surface treatment method therefor Electricity 0 Active
US8343372B2 Surface processing method for mounting stage Electricity 0 Active
US8545672B2 Plasma processing apparatus Electricity 0 Active
US7815492B2 Surface treatment method Performing Operations; Transporting 0 Active
US10651813B2 Method for designing filter Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.