Eiichiro Kikuchi
6Patents
1h-index
8Co-inventors
40Inventor score
Filing activity: Mar 19, 2007 → Jul 21, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10541158B2 | Temperature adjustment method using wet surface in a processing chamber | Electricity | 1 | Active |
| US9214376B2 | Substrate mounting stage and surface treatment method therefor | Electricity | 0 | Active |
| US8343372B2 | Surface processing method for mounting stage | Electricity | 0 | Active |
| US8545672B2 | Plasma processing apparatus | Electricity | 0 | Active |
| US7815492B2 | Surface treatment method | Performing Operations; Transporting | 0 | Active |
| US10651813B2 | Method for designing filter | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.