Inventor · Sagamihara, JP

Eiichiro Takanabe

7Patents
7h-index
12Co-inventors
56Inventor score

Filing activity: Aug 17, 1989 → Apr 13, 2000

Most-cited inventions

PatentTitleAreaCited byStatus
US5775889A Heat treatment process for preventing slips in semiconductor wafers Chemistry; Metallurgy 369 Expired
US5388944A Vertical heat-treating apparatus and heat-treating process by using the vertical heat-treating apparatus Emerging Cross-Sectional Technologies 78 Expired
US5277579A Wafers transferring method in vertical type heat treatment apparatus and the vertical type heat treatment apparatus provided with a wafers transferring system Emerging Cross-Sectional Technologies 52 Expired
US5016567A Apparatus for treatment using gas Emerging Cross-Sectional Technologies 20 Expired
US5030056A Substrate transfer device Emerging Cross-Sectional Technologies 16 Expired
US6402848B1 Single-substrate-treating apparatus for semiconductor processing system Electricity 15 Expired
US5688116A Heat treatment process Mechanical Engineering; Lighting; Heating 11 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.