Erich Schubert
8Patents
3h-index
15Co-inventors
50Inventor score
Filing activity: Feb 9, 2004 → Apr 26, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7321126B2 | Collector with fastening devices for fastening mirror shells | Physics | 22 | Expired |
| US9599904B2 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Physics | 14 | Active |
| US8467031B2 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Physics | 5 | Active |
| US9310694B2 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Physics | 3 | Active |
| US7091505B2 | Collector with fastening devices for fastening mirror shells | Physics | 3 | Expired |
| US7405809B2 | Illumination system particularly for microlithography | Physics | 2 | Active |
| US10191382B2 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Physics | 1 | Active |
| US9977333B2 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.