Collector with fastening devices for fastening mirror shells

US7321126B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Wolfgang Singer · Aalen, DE
• Wilhelm Egle · Aalen, DE
• Markus Weiss · Aalen, DE
• Joachim Hainz · Aalen, DE
• Joachim Wietzorrek · Aalen, DE
• Johannes Wangler · Oberkochen, DE
• Frank Melzer · Utzmemmingen, DE
• Bernhard Gellrich · Aalen, DE
• Bernhard Geuppert · Lauchheim, DE
• Erich Schubert · Ellwangen, DE
• Martin Antoni · Aalen, DE

Key dates

• Filing date: May 2, 2006
• Grant date: Jan 22, 2008
• Expiry date: May 2, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K5/04
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

There is provided a projection exposure system operable in a scanning mode along a scanning direction. The projection exposure system includes a collector that receives light having a wavelength ≦193 nm and illuminates a region in a plane. The plane is defined by a local coordinate system having a y-direction parallel to the scanning direction and an x-direction perpendicular to the scanning direction. The collector includes (a) a first mirror shell, (b) a second mirror shell within the first mirror shell, and (c) a fastening device for fastening the first and second mirror shells. The mirror shells are substantially rotational symmetric about a common rotational axis. The fastening device has a support spoke that extends in a radial direction of the mirror shells, and the support spoke, when projected into the plane, yields a projection that is non-parallel to the y-direction.