Eunsuk Ko
4Patents
1h-index
7Co-inventors
33Inventor score
Filing activity: Dec 18, 2017 → Apr 9, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11694911B2 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Electricity | 4 | Active |
| US12211709B2 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Electricity | 0 | Active |
| US12272570B2 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Electricity | 0 | Active |
| US12272571B2 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.