Fukashi Harada
3Patents
1h-index
12Co-inventors
41Inventor score
Filing activity: Aug 21, 1991 → Jul 17, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5397432A | Method for producing semiconductor integrated circuits and apparatus used in such method | Electricity | 29 | Expired |
| US7682983B2 | Manufacturing method of electronic device with resist ashing | Electricity | 0 | Active |
| US6949437B2 | Manufacturing method of semiconductor device including an anisotropic etching step | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.