Fumihiro Kamimura
10Patents
1h-index
20Co-inventors
50Inventor score
Filing activity: Aug 1, 2007 → Nov 27, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8475668B2 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein | Electricity | 3 | Active |
| US11869777B2 | Substrate processing method and substrate processing apparatus | Electricity | 1 | Active |
| US8303723B2 | Liquid processing apparatus, liquid processing method, and storage medium | Electricity | 1 | Active |
| US11712710B2 | Substrate processing apparatus and substrate processing method | Electricity | 1 | Active |
| US10811266B2 | Substrate liquid processing apparatus and method, and computer-readable storage medium storing substrate liquid processing program | Electricity | 0 | Active |
| US9099502B2 | Chemical-liquid mixing method and chemical-liquid mixing apparatus | Chemistry; Metallurgy | 0 | Active |
| US9415356B1 | Chemical-liquid mixing method and chemical-liquid mixing apparatus | Chemistry; Metallurgy | 0 | Active |
| US9627192B2 | Substrate processing method, substrate processing apparatus, and computer-readable storage medium stored with substrate processing program | Electricity | 0 | Active |
| US9339775B2 | Chemical-liquid mixing method and chemical-liquid mixing apparatus | Chemistry; Metallurgy | 0 | Active |
| US12362202B2 | Substrate processing method and substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.