Inventor · Rifu, JP

Fumitoshi Kumagai

3Patents
3h-index
6Co-inventors
39Inventor score

Filing activity: Feb 19, 2013 → Feb 5, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US10115567B2 Plasma processing apparatus Electricity 36 Active
US10755894B2 Power supply system Electricity 36 Active
US9922802B2 Power supply system, plasma etching apparatus, and plasma etching method Electricity 32 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.