Inventor · Los Altos, CA, US

Gary Bultman

26Patents
21h-index
14Co-inventors
78Inventor score

Filing activity: Sep 20, 2001 → Oct 17, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US6633831B2 Methods and systems for determining a critical dimension and a thin film characteristic of a specimen Emerging Cross-Sectional Technologies 246 Expired
US8179530B2 Methods and systems for determining a critical dimension and overlay of a specimen Electricity 127 Active
US6694284B1 Methods and systems for determining at least four properties of a specimen Electricity 120 Expired
US6891627B1 Methods and systems for determining a critical dimension and overlay of a specimen Electricity 117 Expired
US6673637B2 Methods and systems for determining a presence of macro defects and overlay of a specimen Electricity 71 Expired
US6919957B2 Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen Electricity 66 Expired
US6829559B2 Methods and systems for determining a presence of macro and micro defects on a specimen Emerging Cross-Sectional Technologies 56 Expired
US7139083B2 Methods and systems for determining a composition and a thickness of a specimen Emerging Cross-Sectional Technologies 47 Expired
US6782337B2 Methods and systems for determining a critical dimension an a presence of defects on a specimen Electricity 47 Expired
US7751046B2 Methods and systems for determining a critical dimension and overlay of a specimen Electricity 45 Expired
US6812045B1 Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation Electricity 45 Expired
US7106425B1 Methods and systems for determining a presence of defects and a thin film characteristic of a specimen Physics 39 Expired
US7196782B2 Methods and systems for determining a thin film characteristic and an electrical property of a specimen Emerging Cross-Sectional Technologies 39 Expired
US6806951B2 Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen Emerging Cross-Sectional Technologies 38 Expired
US6917433B2 Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process Emerging Cross-Sectional Technologies 35 Expired
US6917419B2 Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen Emerging Cross-Sectional Technologies 31 Expired
US6950196B2 Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen Emerging Cross-Sectional Technologies 31 Expired
US7006235B2 Methods and systems for determining overlay and flatness of a specimen Emerging Cross-Sectional Technologies 30 Expired
US6891610B2 Methods and systems for determining an implant characteristic and a presence of defects on a specimen Emerging Cross-Sectional Technologies 28 Expired
US6946394B2 Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process Emerging Cross-Sectional Technologies 28 Expired
US6818459B2 Methods and systems for determining a presence of macro defects and overlay of a specimen Electricity 28 Expired
US8502979B2 Methods and systems for determining a critical dimension and overlay of a specimen Electricity 21 Active
US7130029B2 Methods and systems for determining an adhesion characteristic and a thickness of a specimen Electricity 20 Expired
US7349090B2 Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography Electricity 9 Expired
US7460981B2 Methods and systems for determining a presence of macro and micro defects on a specimen Emerging Cross-Sectional Technologies 5 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.