George J. Hefferon
7Patents
7h-index
20Co-inventors
59Inventor score
Filing activity: Oct 30, 1987 → Dec 9, 1997
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4939070A | Thermally stable photoresists with high sensitivity | Emerging Cross-Sectional Technologies | 74 | Expired |
| US4908298A | Method of creating patterned multilayer films for use in production of semiconductor circuits and systems | Emerging Cross-Sectional Technologies | 63 | Expired |
| US5744537A | Antireflective coating films | Emerging Cross-Sectional Technologies | 43 | Expired |
| US6057080A | Top antireflective coating film | Emerging Cross-Sectional Technologies | 41 | Expired |
| US5609989A | Acid scavengers for use in chemically amplified photoresists | Physics | 32 | Expired |
| US5733705A | Acid Scavengers for use in chemically amplified photoresists | Physics | 10 | Expired |
| US5667938A | Acid scavengers for use in chemically amplified photoresists | Physics | 9 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.