George Mueller
5Patents
5h-index
5Co-inventors
45Inventor score
Filing activity: Aug 28, 1997 → Nov 30, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6178919A | Perforated plasma confinement ring in plasma reactors | Emerging Cross-Sectional Technologies | 113 | Expired |
| US6090304A | Methods for selective plasma etch | Electricity | 62 | Expired |
| US6506685B2 | Perforated plasma confinement ring in plasma reactors | Emerging Cross-Sectional Technologies | 33 | Expired |
| US6117786A | Method for etching silicon dioxide using fluorocarbon gas chemistry | Electricity | 32 | Expired |
| US6410451B1 | Techniques for improving etching in a plasma processing chamber | Electricity | 14 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.