Inventor · Munich, DE

Gerd Scheuring

2Patents
0h-index
4Co-inventors
21Inventor score

Filing activity: Mar 19, 2004 → Sep 17, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US7460962B2 Method for an automatic optical measuring of an OPC structure Physics 0 Active
US7375792B2 Apparatus for measuring feature widths on masks for the semiconductor industry Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.