Glen W. Scheid
2Patents
2h-index
5Co-inventors
30Inventor score
Filing activity: Oct 29, 1999 → Mar 22, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6268270A | Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization | Physics | 40 | Expired |
| US6738731B1 | Method and apparatus for using tool state information to identify faulty wafers | Physics | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.