Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization
US6268270A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 29, 1999 |
| Grant date | Jul 31, 2001 |
| Priority date | — |
| Expiry date | Oct 29, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J1/32
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods of optimizing a preheat recipe for rapid thermal processing workpieces are provided. In one aspect, a method of manufacturing is provided that includes preheating a rapid thermal processing chamber according to a preheating recipe and processing a first plurality of workpieces in the rapid thermal processing chamber. Parameter measurements are performed on a first workpiece and a second workpiece of the first plurality of workpieces. The parameter measurements are indicative of processing differences between the first and second workpieces. An output signal is formed corresponding to the parameter measurements and a control signal based on the output signal is used to adjust the preheating recipe for preheating the rapid thermal processing chamber for processing a second plurality of workpieces in the rapid thermal processing chamber to reduce processing differences between first and second workpieces of the second plurality of workpieces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.