Goetz Springer
2Patents
2h-index
6Co-inventors
37Inventor score
Filing activity: May 18, 1998 → Nov 13, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6068540A | Polishing device and polishing cloth for semiconductor substrates | Performing Operations; Transporting | 9 | Expired |
| US7785935B2 | Manufacturing method for forming an integrated circuit device and corresponding integrated circuit device | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.