Gotz Springer
2Patents
2h-index
5Co-inventors
30Inventor score
Filing activity: Feb 29, 2000 → Jun 27, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6257955A | Apparatus and method for heating a liquid or viscous polishing agent, and device for polishing wafers | Mechanical Engineering; Lighting; Heating | 21 | Expired |
| US6965809B2 | Method for characterizing and simulating a chemical mechanical polishing process | Performing Operations; Transporting | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.