Gregory C. Lee
8Patents
5h-index
21Co-inventors
59Inventor score
Filing activity: Jul 10, 1998 → Jan 15, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6000997A | Temperature regulation in a CMP process | Performing Operations; Transporting | 56 | Expired |
| US6517426B2 | Composite polishing pad for chemical-mechanical polishing | Performing Operations; Transporting | 38 | Expired |
| US6315857A | Polishing pad shaping and patterning | Performing Operations; Transporting | 19 | Expired |
| US6042457A | Conditioner assembly for a chemical mechanical polishing apparatus | Performing Operations; Transporting | 19 | Expired |
| US6159083A | Polishing head for a chemical mechanical polishing apparatus | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6988934B1 | Method and apparatus of a variable height and controlled fluid flow platen in a chemical mechanical polishing system | Performing Operations; Transporting | 4 | Expired |
| US6322429A | Conditioner assembly and a conditioner back support for a chemical mechanical polishing apparatus | Performing Operations; Transporting | 0 | Expired |
| US8480060B2 | Crane cable roller assembly | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.