Inventor · Sunnyvale, CA, US

Gregory C. Lee

8Patents
5h-index
21Co-inventors
59Inventor score

Filing activity: Jul 10, 1998 → Jan 15, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US6000997A Temperature regulation in a CMP process Performing Operations; Transporting 56 Expired
US6517426B2 Composite polishing pad for chemical-mechanical polishing Performing Operations; Transporting 38 Expired
US6315857A Polishing pad shaping and patterning Performing Operations; Transporting 19 Expired
US6042457A Conditioner assembly for a chemical mechanical polishing apparatus Performing Operations; Transporting 19 Expired
US6159083A Polishing head for a chemical mechanical polishing apparatus Emerging Cross-Sectional Technologies 7 Expired
US6988934B1 Method and apparatus of a variable height and controlled fluid flow platen in a chemical mechanical polishing system Performing Operations; Transporting 4 Expired
US6322429A Conditioner assembly and a conditioner back support for a chemical mechanical polishing apparatus Performing Operations; Transporting 0 Expired
US8480060B2 Crane cable roller assembly Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.