Inventor · Urbana, IL, US

Gregory E. Stillman

4Patents
4h-index
7Co-inventors
36Inventor score

Filing activity: Mar 24, 1995 → Sep 2, 1998

Most-cited inventions

PatentTitleAreaCited byStatus
US5580382A Process for forming silicon doped group III-V semiconductors with SiBr.sub. 4 Electricity 9 Expired
US5656538A Halide dopant process for producing semi-insulating group III-V regions for semiconductor devices Emerging Cross-Sectional Technologies 8 Expired
US6019840A Process for forming deep level impurity undoped phosphorous containing semi-insulating epitaxial layers Chemistry; Metallurgy 7 Expired
US6103614A Hydrogen ambient process for low contact resistivity PdGe contacts to III-V materials Electricity 5 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.