Inventor · Shanghai, CN

Haifeng Pu

2Patents
0h-index
9Co-inventors
21Inventor score

Filing activity: May 12, 2020 → Feb 5, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US11320746B1 Method and system for manufacturing integrated circuit Electricity 0 Active
US11966203B2 System and method to adjust a kinetics model of surface reactions during plasma processing Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.