Haoquan Yan
6Patents
3h-index
13Co-inventors
46Inventor score
Filing activity: May 6, 2015 → Jun 6, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10541168B2 | Edge ring centering method using ring dynamic alignment data | Electricity | 7 | Active |
| US10658222B2 | Moveable edge coupling ring for edge process control during semiconductor wafer processing | Electricity | 4 | Active |
| US11031215B2 | Vacuum pump protection against deposition byproduct buildup | Electricity | 3 | Active |
| US12087561B2 | Vacuum pump protection against deposition byproduct buildup | Electricity | 0 | Active |
| US11710623B2 | Vacuum pump protection against deposition byproduct buildup | Electricity | 0 | Active |
| US12027410B2 | Edge ring arrangement with moveable edge rings | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.