Hideki Lee
9Patents
9h-index
15Co-inventors
58Inventor score
Filing activity: Oct 24, 1991 → Feb 21, 1997
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5637153A | Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus | Chemistry; Metallurgy | 298 | Expired |
| US5647945A | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 240 | Expired |
| US5616208A | Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus | Emerging Cross-Sectional Technologies | 120 | Expired |
| US5785796A | Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus | Emerging Cross-Sectional Technologies | 99 | Expired |
| US5951772A | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 48 | Expired |
| US5525160A | Film deposition processing device having transparent support and transfer pins | Chemistry; Metallurgy | 45 | Expired |
| US5380370A | Method of cleaning reaction tube | Chemistry; Metallurgy | 33 | Expired |
| US5711815A | Film forming apparatus and film forming method | Chemistry; Metallurgy | 16 | Expired |
| US5180692A | Method for the manufacture of boron-containing films by CVD or epitaxial techniques using boron trifluoride | Emerging Cross-Sectional Technologies | 9 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.