Inventor · Nirasaki, JP

Hideki Lee

9Patents
9h-index
15Co-inventors
58Inventor score

Filing activity: Oct 24, 1991 → Feb 21, 1997

Most-cited inventions

PatentTitleAreaCited byStatus
US5637153A Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus Chemistry; Metallurgy 298 Expired
US5647945A Vacuum processing apparatus Emerging Cross-Sectional Technologies 240 Expired
US5616208A Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus Emerging Cross-Sectional Technologies 120 Expired
US5785796A Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus Emerging Cross-Sectional Technologies 99 Expired
US5951772A Vacuum processing apparatus Emerging Cross-Sectional Technologies 48 Expired
US5525160A Film deposition processing device having transparent support and transfer pins Chemistry; Metallurgy 45 Expired
US5380370A Method of cleaning reaction tube Chemistry; Metallurgy 33 Expired
US5711815A Film forming apparatus and film forming method Chemistry; Metallurgy 16 Expired
US5180692A Method for the manufacture of boron-containing films by CVD or epitaxial techniques using boron trifluoride Emerging Cross-Sectional Technologies 9 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.