Hideki Suda
9Patents
3h-index
6Co-inventors
46Inventor score
Filing activity: Mar 27, 1997 → Sep 14, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5942356A | Phase shift mask and phase shift mask blank | Physics | 28 | Expired |
| US7674563B2 | Pattern forming method and phase shift mask manufacturing method | Physics | 10 | Active |
| US6153341A | Phase shift mask and phase shift mask blank | Physics | 4 | Expired |
| US7678509B2 | Method of producing phase shift masks | Physics | 3 | Active |
| US7846617B2 | Pattern forming method and phase shift mask manufacturing method | Physics | 3 | Active |
| US6242138A | Phase shift mask and phase shift mask blank | Physics | 3 | Expired |
| US8273506B2 | Method of manufacturing optical element, and optical element | Physics | 0 | Active |
| US9035095B2 | Processes for producing succinic acid | Chemistry; Metallurgy | 0 | Active |
| US6475681B2 | Phase shift mask and phase shift mask blank | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.