Inventor · Tokyo, JP

Hideki Suda

9Patents
3h-index
6Co-inventors
46Inventor score

Filing activity: Mar 27, 1997 → Sep 14, 2012

Most-cited inventions

PatentTitleAreaCited byStatus
US5942356A Phase shift mask and phase shift mask blank Physics 28 Expired
US7674563B2 Pattern forming method and phase shift mask manufacturing method Physics 10 Active
US6153341A Phase shift mask and phase shift mask blank Physics 4 Expired
US7678509B2 Method of producing phase shift masks Physics 3 Active
US7846617B2 Pattern forming method and phase shift mask manufacturing method Physics 3 Active
US6242138A Phase shift mask and phase shift mask blank Physics 3 Expired
US8273506B2 Method of manufacturing optical element, and optical element Physics 0 Active
US9035095B2 Processes for producing succinic acid Chemistry; Metallurgy 0 Active
US6475681B2 Phase shift mask and phase shift mask blank Physics 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.