Inventor · Kumamoto, JP

Hiromi Hara

13Patents
2h-index
20Co-inventors
54Inventor score

Filing activity: May 16, 1991 → Feb 16, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US6120222A Machine tool Emerging Cross-Sectional Technologies 26 Expired
US5192139A Apparatus for cooling a spindle bearing of a machine Emerging Cross-Sectional Technologies 25 Expired
US8777695B2 Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method Electricity 2 Active
US10032642B2 Substrate liquid processing apparatus Electricity 1 Active
US8803039B2 Heating unit, substrate processing apparatus, and method for heating fluid Mechanical Engineering; Lighting; Heating 1 Active
US10460964B2 Substrate liquid processing apparatus and method, and computer-readable storage medium stored with substrate liquid processing program Electricity 0 Active
US9887092B2 Etching method, etching apparatus, and storage medium Electricity 0 Active
US11056360B2 Substrate liquid processing apparatus and method, and computer-redable storage medium stored with substrate liquid processing program Electricity 0 Active
US10607849B2 Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium storing substrate liquid processing program Electricity 0 Active
US10811266B2 Substrate liquid processing apparatus and method, and computer-readable storage medium storing substrate liquid processing program Electricity 0 Active
US11062922B2 Substrate liquid processing apparatus Electricity 0 Active
US12322631B2 Substrate processing system, substrate processing method, and recording medium Emerging Cross-Sectional Technologies 0 Active
US10985035B2 Substrate liquid processing apparatus, substrate liquid processing method and computer readable recording medium having substrate liquid processing program recorded therein Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.