Heating unit, substrate processing apparatus, and method for heating fluid
US8803039B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 27, 2009 |
| Grant date | Aug 12, 2014 |
| Priority date | — |
| Expiry date | Sep 25, 2032 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF24H15/429
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
In a heating unit, based on a required output amount Q, a control part 50 performs: (A) when the required output amount Q is not more than a predetermined set value, a control in which none of the heating devices 24a is continuously kept on throughout a heating cycle, and all or one or more heating devices 24a are controlled in a periodically divided manner; and (B) when the required output amount is larger than the predetermined set value, a control in which all or one or more heating devices 24a are continuously kept on throughout the heating cycle, and all or one or more heating devices 24a among the remaining heating devices 24a are controlled in the periodically divided manner during this heating cycle. At this time, a difference between the maximum number and the minimum number of the heating devices 24a that are simultaneously kept on during the heating cycle is made not more than 1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.