Hitoshi Hatada
3Patents
1h-index
5Co-inventors
33Inventor score
Filing activity: May 22, 2001 → Apr 2, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6811953B2 | Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice | Physics | 234 | Expired |
| US8427628B2 | Exposure apparatus, exposure method and device fabricating method | Physics | 0 | Active |
| US8130364B2 | Projection optical apparatus, exposure method and apparatus, photomask, and device and photomask manufacturing method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.