Inventor · Hsinchu, TW

Hsiu-Lan Lee

2Patents
2h-index
3Co-inventors
27Inventor score

Filing activity: Jul 24, 1997 → Jun 4, 1998

Most-cited inventions

PatentTitleAreaCited byStatus
US5904154A Method for removing fluorinated photoresist layers from semiconductor substrates Electricity 62 Expired
US6423646B1 Method for removing etch-induced polymer film and damaged silicon layer from a silicon surface Chemistry; Metallurgy 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.