Inventor · Hwaseong-si, KR

Hyung-Su Son

4Patents
1h-index
13Co-inventors
41Inventor score

Filing activity: Oct 25, 2010 → Nov 14, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US8034641B2 Method for inspection of defects on a substrate Electricity 3 Active
US9261532B1 Conductive atomic force microscope and method of operating the same Physics 1 Active
US10504804B2 Laser processing method, substrate dicing method and substrate processing system for performing the same Electricity 0 Active
US11004754B2 X-ray topographic apparatus and substrate processing system using the apparatus Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.