Hyung-Su Son
4Patents
1h-index
13Co-inventors
41Inventor score
Filing activity: Oct 25, 2010 → Nov 14, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8034641B2 | Method for inspection of defects on a substrate | Electricity | 3 | Active |
| US9261532B1 | Conductive atomic force microscope and method of operating the same | Physics | 1 | Active |
| US10504804B2 | Laser processing method, substrate dicing method and substrate processing system for performing the same | Electricity | 0 | Active |
| US11004754B2 | X-ray topographic apparatus and substrate processing system using the apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.