Inventor · Suwon-si, KR

Ill Hyun Park

3Patents
0h-index
11Co-inventors
31Inventor score

Filing activity: Aug 17, 2016 → Sep 20, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US11764064B2 Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer Physics 0 Active
US11158510B2 Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer Physics 0 Active
US11478828B2 Adhesive removing device and method Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.