Adhesive removing device and method
US11478828B2 · kind B2 · utility
0Cited by
5References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 17, 2016 |
| Grant date | Oct 25, 2022 |
| Priority date | — |
| Expiry date | Dec 20, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B2220/01
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided is an adhesive removing device for removing an adhesive for adhering a mask and a pellicle from the mask. The adhesive removing device includes: a laser irradiating unit configured to irradiate a laser beam to an adhesive layer formed between the mask and the pellicle; a controller configured to control a wavelength, a waveform, and an energy density of the laser beam, so as to remove the adhesive layer through emission of the laser beam; and an imaging unit configured to monitor a region to which the laser beam is irradiated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.