Jacques Beauvais
8Patents
4h-index
9Co-inventors
50Inventor score
Filing activity: Mar 20, 1997 → Mar 6, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8943897B2 | Carbon nanotubes based sensing elements and system for monitoring and mapping force, strain and stress | Human Necessities | 50 | Active |
| US6261938A | Fabrication of sub-micron etch-resistant metal/semiconductor structures using resistless electron beam lithography | Physics | 30 | Expired |
| US5918143A | Fabrication of sub-micron silicide structures on silicon using resistless electron beam lithography | Electricity | 8 | Expired |
| US6514877B1 | Method using sub-micron silicide structures formed by direct-write electron beam lithography for fabricating masks for extreme ultra-violet and deep ultra-violet lithography | Physics | 4 | Expired |
| US6897140B2 | Fabrication of structures of metal/semiconductor compound by X-ray/EUV projection lithography | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6855646B2 | Plasma polymerized electron beam resist | Emerging Cross-Sectional Technologies | 1 | Expired |
| US6777167B2 | Method of producing an etch-resistant polymer structure using electron beam lithography | Physics | 0 | Expired |
| US12429971B2 | Soft phasic electronic tactile sensing elements for characterization of touch | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.