Inventor · Suneung-ri, KR

Jae Hee SIM

3Patents
1h-index
6Co-inventors
33Inventor score

Filing activity: Oct 29, 2015 → Oct 28, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US9796001B2 Apparatus and method for removing particles present on a wafer using photoelectrons and an electric field Electricity 1 Active
US11651968B2 Method for forming planarization layer and pattern forming method using the same Electricity 0 Active
US9947546B2 Semiconductor integrated circuit device with a surface and method of manufacturing the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.