James Tsung
7Patents
5h-index
10Co-inventors
52Inventor score
Filing activity: Jul 9, 1999 → Dec 14, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6235163A | Methods and apparatus for ionized metal plasma copper deposition with enhanced in-film particle performance | Electricity | 43 | Expired |
| US6852202B2 | Small epicyclic magnetron with controlled radial sputtering profile | Electricity | 27 | Expired |
| US6841050B2 | Small planetary magnetron | Electricity | 19 | Expired |
| US6376807B1 | Enhanced cooling IMP coil support | Electricity | 11 | Expired |
| US7169271B2 | Magnetron executing planetary motion adjacent a sputtering target | Electricity | 8 | Expired |
| US7807030B2 | Small scanned magentron | Electricity | 3 | Active |
| US6580057B2 | Enhanced cooling IMP coil support | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.