Inventor · Overpelt, BE

Jan Bex

3Patents
1h-index
9Co-inventors
33Inventor score

Filing activity: Sep 12, 2006 → Apr 25, 2012

Most-cited inventions

PatentTitleAreaCited byStatus
US9354528B2 Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Physics 4 Active
US7628875B2 MEMS device and assembly method Emerging Cross-Sectional Technologies 0 Active
US9360771B2 Electrostatic clamp, lithographic apparatus, and device manufacturing method Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.