Jan Bex
3Patents
1h-index
9Co-inventors
33Inventor score
Filing activity: Sep 12, 2006 → Apr 25, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9354528B2 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Physics | 4 | Active |
| US7628875B2 | MEMS device and assembly method | Emerging Cross-Sectional Technologies | 0 | Active |
| US9360771B2 | Electrostatic clamp, lithographic apparatus, and device manufacturing method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.