Jihoon Na
2Patents
0h-index
9Co-inventors
21Inventor score
Filing activity: Sep 7, 2021 → Oct 12, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11729896B2 | Apparatus for generating extreme ultraviolet (EUV), method of manufacturing the same, and EUV system | Physics | 0 | Active |
| US11531277B2 | Extreme ultraviolet (EUV) mask inspection system, a load-lock chamber included therein, and a method for inspecting an EUV mask using the EUV mask inspection system | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.