Jin-Ning Sung
7Patents
3h-index
11Co-inventors
46Inventor score
Filing activity: Apr 1, 2009 → Aug 10, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8437870B2 | System and method for implementing a virtual metrology advanced process control platform | Electricity | 25 | Active |
| US8394719B2 | System and method for implementing multi-resolution advanced process control | Emerging Cross-Sectional Technologies | 5 | Active |
| US9102033B2 | Apparatus and method for target thickness and surface profile uniformity control of multi-head chemical mechanical polishing process | Electricity | 4 | Active |
| US7951615B2 | System and method for implementing multi-resolution advanced process control | Emerging Cross-Sectional Technologies | 1 | Active |
| US8549012B2 | Processing exception handling | Physics | 1 | Active |
| US10096482B2 | Apparatus and method for chemical mechanical polishing process control | Electricity | 1 | Active |
| US9477219B2 | Dynamic compensation in advanced process control | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.