Inventor · Boppard, DE

Joerg Mallmann

5Patents
2h-index
20Co-inventors
47Inventor score

Filing activity: Aug 13, 2004 → Aug 29, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US7532306B2 Microlithographic projection exposure apparatus Physics 16 Expired
US7570343B2 Microlithographic projection exposure apparatus Physics 7 Expired
US8330935B2 Exposure apparatus and measuring device for a projection lens Physics 2 Active
US9436095B2 Exposure apparatus and measuring device for a projection lens Physics 1 Active
US10345710B2 Microlithographic projection exposure apparatus and measuring device for a projection lens Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.