Inventor · Oberkochen, DE

Joerg Specht

2Patents
0h-index
4Co-inventors
21Inventor score

Filing activity: May 3, 2016 → Oct 24, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US10018803B2 Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement Physics 0 Active
US10007195B2 Device for determining a tilt angle of at least one mirror of a lithography system, and method Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.