Joerg Specht
2Patents
0h-index
4Co-inventors
21Inventor score
Filing activity: May 3, 2016 → Oct 24, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10018803B2 | Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement | Physics | 0 | Active |
| US10007195B2 | Device for determining a tilt angle of at least one mirror of a lithography system, and method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.