Patent · US Active

Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement

US10018803B2 · kind B2 · utility

0Cited by

0References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Jan Horn · Munich, DE
Markus Holz · Aalen, DE
Joerg Specht · Oberkochen, DE
Johannes Eisenmenger · Ulm, DE
Stefan Krone · Aalen, DE

Key dates

Filing date	Oct 24, 2016
Grant date	Jul 10, 2018
Priority date	—
Expiry date	Oct 24, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/7085
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An external facility is used to control positioning of multiple displaceable mirror elements of a multi-mirror arrangement. The external facility is to a multi-mirror arrangement via a data channel having a bandwidth of at least 1 kHz per controlled degree of freedom of displacement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.