John E. Bjorkholm
10Patents
6h-index
17Co-inventors
63Inventor score
Filing activity: Jan 2, 1976 → Jul 30, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6815129B1 | Compensation of flare-induced CD changes EUVL | Physics | 33 | Expired |
| US6625802B2 | Method for modifying a chip layout to minimize within-die CD variations caused by flare variations in EUV lithography | Physics | 27 | Expired |
| US4327288A | Method for focusing neutral atoms, molecules and ions | Physics | 24 | Expired |
| US4518456A | Light induced etching of InP by aqueous solutions of H.sub.3 PO.sub.4 | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6898781B2 | Method for modifying a chip layout to minimize within-die CD variations caused by flare variations in EUV lithography | Physics | 14 | Expired |
| US4410239A | Nonlinear optical device using self-trapping of light | Physics | 8 | Expired |
| US4047026A | Deflection of atomic beams with isotope separation by optical resonance radiation using stimulated emission and the A.C. Stark effect | Physics | 6 | Expired |
| US4058739A | Method and apparatus for phase matching by adjustment of the fundamental frequencies | Physics | 3 | Expired |
| US4375033A | Universal detector for atomic and molecular beams | Physics | 2 | Expired |
| US4303840A | Single beam second harmonic generation in isotropic media | Physics | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.