Jon Mohn
8Patents
7h-index
15Co-inventors
52Inventor score
Filing activity: Jan 21, 1994 → Jun 16, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6024826A | Plasma reactor with heated source of a polymer-hardening precursor material | Electricity | 56 | Expired |
| US5762714A | Plasma guard for chamber equipped with electrostatic chuck | Electricity | 50 | Expired |
| US5437757A | Clamp ring for domed pedestal in wafer processing chamber | Electricity | 40 | Expired |
| US6218312A | Plasma reactor with heated source of a polymer-hardening precursor material | Electricity | 35 | Expired |
| US5990017A | Plasma reactor with heated source of a polymer-hardening precursor material | Electricity | 17 | Expired |
| US6036877A | Plasma reactor with heated source of a polymer-hardening precursor material | Electricity | 16 | Expired |
| US6440866B1 | Plasma reactor with heated source of a polymer-hardening precursor material | Electricity | 13 | Expired |
| US6193836A | Center gas feed apparatus for a high density plasma reactor | Emerging Cross-Sectional Technologies | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.