Inventor · Pepperell, MA, US

Joseph Hallisey

8Patents
2h-index
13Co-inventors
44Inventor score

Filing activity: May 19, 2008 → Feb 4, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US8272825B2 Load lock fast pump vent Electricity 22 Active
US8662812B2 Load lock fast pump vent Electricity 11 Active
US10854478B2 Load lock fast pump vent Electricity 1 Active
US9478446B2 Load lock chamber Electricity 1 Active
US11610787B2 Load lock fast pump vent Electricity 0 Active
US10541157B2 Load lock fast pump vent Electricity 0 Active
US11569111B2 Substrate processing apparatus Electricity 0 Active
US12046499B2 Substrate processing apparatus Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.