Substrate processing apparatus
US12046499B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 4, 2021 |
| Grant date | Jul 23, 2024 |
| Priority date | — |
| Expiry date | May 1, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G49/067
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate transport apparatus comprising a support frame an articulated arm connected to the support frame, having at least one movable arm link and an end effector connected to the movable arm link, with a substrate holding station located thereon. Wherein the movable arm link is a reconfigurable arm link having a modular composite arm link casing, formed of link case modules rigidly coupled to each other, and a pulley system cased in and extending through the rigidly coupled link case modules substantially end to end of the modular composite arm link casing, wherein the rigidly coupled link case modules include link case end modules connected by at least one interchangeable link case extension module having a predetermined characteristic determining a length of the movable arm link, wherein at least one interchangeable link case extension module is selectable for connection to link case end modules forming the reconfigurable arm link.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.