Load lock fast pump vent
US8272825B2 · kind B2 · utility
22Cited by
35References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 19, 2008 |
| Grant date | Sep 25, 2012 |
| Priority date | — |
| Expiry date | Apr 23, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67201
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate processing tool including a frame forming at least one isolatable chamber configured to hold a controlled atmosphere, at least two substrate supports located within each of the at least one isolatable chamber, each of the at least two substrate supports being stacked one above the other and configured to hold a respective substrate and a cooling unit communicably coupled to the at least two substrate supports such that the at least two substrate supports and cooling unit effect simultaneous conductive cooling of each of the respective substrates located on the at least two substrate supports.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.