Joshua E. Byrne
3Patents
3h-index
5Co-inventors
36Inventor score
Filing activity: Aug 15, 1994 → May 8, 1996
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6051284A | Chamber monitoring and adjustment by plasma RF metrology | Electricity | 27 | Expired |
| US5756222A | Corrosion-resistant aluminum article for semiconductor processing equipment | Emerging Cross-Sectional Technologies | 25 | Expired |
| US5811195A | Corrosion-resistant aluminum article for semiconductor processing equipment | Emerging Cross-Sectional Technologies | 23 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.