Ju-A Ryu
2Patents
1h-index
11Co-inventors
31Inventor score
Filing activity: Jul 25, 2008 → Jan 15, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8027017B2 | Substrate treating apparatus and exposing apparatus for cleaning a chuck cleaning tool with treating bath | Electricity | 3 | Active |
| US7914594B2 | Air filtering device and cleaning system of semiconductor manufacturing apparatus with the same | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.