Air filtering device and cleaning system of semiconductor manufacturing apparatus with the same
US7914594B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2008 |
| Grant date | Mar 29, 2011 |
| Priority date | — |
| Expiry date | Jun 3, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S55/31
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An air filtering device and an air cleaning system of a semiconductor manufacturing apparatus to reduce cost and increase manufacturing productivity. The air filtering device may include a frame having an open aperture coupled to an air supply line. A buffer frame configured to be inserted into the frame may include a plurality of slot parts, each slot part having a plurality of air in/out apertures through which air may flow in or out from the buffer frame. A plurality of filters may be releasably fastened to the plurality of slot parts to filter pollution material contained in air flowing through the air in/out apertures. An air interrupter for interrupting air flowing through the air in/out apertures may be used when replacing the plurality of filters, thereby providing purified air to the semiconductor manufacturing apparatus during the replacement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.